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Dec 11, 2023
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2022-2023 UMaine Undergraduate Catalog [ARCHIVED CATALOG]
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ECE 464 - Microelectronics Science and Engineering
The science and engineering of CMOS and deep sub-micron semiconductor device fabrication. Semiconductor process steps including: diffusion, oxidation, reactive ion etching, chemical etching, surface cleaning, lithography, ion implantation, thin film deposition and chemical-mechanical polishing. A CMOS process flow is outlined. Computer simulation is utilized to provide insight into ion implantation, diffusion and lithography. Lec 3
General Education Requirements:
Prerequisites: PHY 122 and CHY 121 or 131;
Corequisites: MAT 258
Course Typically Offered: Spring
Credits: 3
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